| 摘要 |
A method and apparatus for selectively disconnecting two electrical conductors either on the surface or below the surface of a semiconductor chip or a thin film interconnection module connecting several semiconductor chips utilizes a thin metal film such as a silver film that is deposited over the ends of two conductors that it may become necessary to disconnect in the future. An insulating layer, such as a silver halide film, having the capability of absorbing the silver film under irradiation or upon heating is deposited over the silver film. Before irradiation or heating, the silver film provides a low resistance electrical connection between the two conductors. When it is desired to disconnect the two conductors, the insulating layer is irradiated by a focused source such as a laser, thus causing the insulating layer to absorb the metal film, thereby breaking the electrical connection between the conductors. Alternatively, the semiconductor chip or the thin film interconnection module may be heated in an oven to cause the conductors to be disconnected.
|
