| 摘要 |
PURPOSE:To obtain the body having a high sensitivity, a high dark resistance and an excellent electrophotographic characteristics in the title body having a photoelectric layer formed by dispersing a-Si particles in a binder resin on a conductive substrate by using the a-Si particles constituting of an inner layer comprising a-Si particles contg. the prescribed element as a base material and a coating layer contg. the prescribed element. CONSTITUTION:The fine particles of the a-Si are constituted of the inner layer which comprises the a-Si contg. at least one of the element selected from the group IIIA element of the periodic table of element as the base material and the coating layer 2 which coats the inner layer and contains at least one of a carbon and/or a nitrogen atom is used, in the title body which is formed by dispersing the photoconductive a-Si particles into the binder resin on the conductive substrate. The inner layer 1 having 0.01-10mu particle size is produced by discharging a starting gas (preferably, B2H6 gas) contg. a silane gas such as SiH4, etc., and the element selected from the group IIIA element of the periodic element using a hydrogen gas as the carrier gas. The a-Si film contg. a carbonaceous film, or the alpha-Si film contg. the carbon and or the nitrogen atoms are used as the film constituting the coating layer 2. |
