| 摘要 |
PURPOSE:To prevent the occurrence of defects due to dust, which is caused when a light shielding plate is moved, and to prevent penumbra blur by providing the light shielding plate, which intercepts the light of a part other than the desired part of a required pattern, under a mask. CONSTITUTION:A masking aperture (light shielding plate) 2 which shields an unnecessary part other than the required pattern of a mask 1 from light is provided under the mask 1. Thus, not only the masking aperture 2 is easily moved even after setting the mask but also the problem of the occurrence of defects due to dust or the like caused by movement is solved. The influence of a penumbra due to the masking aperture 2 is minimized to prevent the penumbra blur. |
