| 摘要 |
PURPOSE:To prevent disconnection from occurring while maintaining a thermal efficiency, by providing a disconnection-preventing film of Cr or the like on a substrate uniformly at a wiring part for leading out from heating resistors to a common electrode, and providing a wiring conductor film pattern thereon. CONSTITUTION:Heating resistors 2 are provided on an ordinary ceramic substrate 7, with a glaze or the like interposed therebetween. On the side of the resistors 2 is provided a common electrode 1, with wiring conductor films 4 therebetween, and on the other side is provided wiring conductor patterns 5 for signal lines. A disconnection-preventing film 6, for example, a Cr film having a resistivity of about 40muOMEGAcm and a film thickness of about 1,000Angstrom is uniformly provided on one side of the resistors 2, and the wiring conductor films 4 are provided thereon in the form of strips. With this construction, breaking of wire due to a defect 3 in the conductor film 4 is prevented by the disconnection- preventing film 6, and the yield of the product is enhanced. |
