发明名称 |
Modular all-electrostatic electron-optical column and assembly of said columns into an array and method of manufacture |
摘要 |
The invention provides a modular-building block method and system of fabrication, installation, alignment and operation of a multi-beam assembly of miniaturized, all-electrostatic charged particle optical columns, such electron beam or ion beam optical columns mounted in parallel in a closely packed cluster over a small target surface area for parallel simultaneous charged particle beam writing on the target surface with the multiple-channel cluster of charged particle beam optical columns. The assembly provides a system and method of increased thru-put in the direct charged particle beam writing on semiconductor target wafers during fabrication of semiconductor micro-circuit chips.
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申请公布号 |
US4661709(A) |
申请公布日期 |
1987.04.28 |
申请号 |
US19850749792 |
申请日期 |
1985.06.28 |
申请人 |
CONTROL DATA CORPORATION |
发明人 |
WALKER, DAVID M.;SLISKI, ALAN P.;HARTE, KENNETH J.;CARRONA, JOHN J. |
分类号 |
H01J37/30;H01J37/317;(IPC1-7):H01J3/38 |
主分类号 |
H01J37/30 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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