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发明名称
APPLICATOR FOR PHOTO-RESIST
摘要
申请公布号
JPS6292316(A)
申请公布日期
1987.04.27
申请号
JP19850231161
申请日期
1985.10.18
申请人
HITACHI LTD
发明人
SAKIYAMA KAZUYUKI;OGAWA SEIICHI;ASHIDA SAKICHI
分类号
H01L21/027;G03F7/16;H01L21/30
主分类号
H01L21/027
代理机构
代理人
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