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发明名称
ION DETECTING ELEMENT AND ION DETECTING ARRAY
摘要
申请公布号
JPS6290980(A)
申请公布日期
1987.04.25
申请号
JP19850128639
申请日期
1985.06.13
申请人
JEOL LTD
发明人
FUJIKURA TOSHIYUKI
分类号
G01N27/62;H01J49/06;H01L31/00;H01L31/09
主分类号
G01N27/62
代理机构
代理人
主权项
地址
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