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经营范围
发明名称
ION MICROBEAM DEVICE
摘要
申请公布号
JPS6290839(A)
申请公布日期
1987.04.25
申请号
JP19850228688
申请日期
1985.10.16
申请人
HITACHI LTD
发明人
KAWANAMI YOSHIMI;ISHITANI TORU;UMEMURA KAORU;TAMURA HIFUMI
分类号
H01J37/147;H01J37/04;H01J37/05;H01J37/30;H01J37/317
主分类号
H01J37/147
代理机构
代理人
主权项
地址
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