| 摘要 |
PURPOSE:To make a film formed by sputtering uniform and to reduce the coercive force of the film by manufacturing an alloy contg. prescribed percentages of Ni, Mo, Fe, etc., and by regulating the grain size of a face of the alloy to be sputtered to a prescribed value. CONSTITUTION:An alloy steel consisting of, by weight, 70-85% Ni, 2-6% Mo and the balance Fe or further contg. one or more among 0.01-2% Si, 0.1-2% Mn and 0.0001-0.02% Mg is manufactured by melting. An ingot of the alloy steel is hot or cold worked and annealed to regulate the grain size of a face to be sputtered to JIS austenite grain size No.3 or below. |
