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发明名称
SPUTTERING DEVICE
摘要
申请公布号
JPS6289881(A)
申请公布日期
1987.04.24
申请号
JP19850228607
申请日期
1985.10.16
申请人
HITACHI LTD
发明人
KAWASHIMA SOSUKE;KANAI SABURO;ICHIHASHI KAZUAKI
分类号
C23F4/00;C23C14/34
主分类号
C23F4/00
代理机构
代理人
主权项
地址
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