发明名称 |
Infrared detector array having an improved area coverage, and method for producing it |
摘要 |
In an infrared detector array, there is provided in the region of the detector plane for the purpose of achieving improved area coverage a waveguide field optical system which has recesses above each individual detector in order to achieve optical impedance matching to the detector array. The walls of the recesses are bevelled in such a way that they guide the incident infrared radiation onto the individual detectors by normal reflection.
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申请公布号 |
DE3537119(A1) |
申请公布日期 |
1987.04.23 |
申请号 |
DE19853537119 |
申请日期 |
1985.10.18 |
申请人 |
BATTELLE-INSTITUT E.V. |
发明人 |
FAYMONVILLE,RUDOLF,DR.;ENGEMANN,DETLEF,DR.;FRENZL,OTTO |
分类号 |
H01L27/144;H01L31/0232;(IPC1-7):H01L31/12;H01L21/306 |
主分类号 |
H01L27/144 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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