| 摘要 |
<p>A Fabry-Perot interferometer comprises a single crystal silicon substrate (1) with an integrally formed diaphragm (6) supported between walls (2-5). A glass superstrate (14) is mounted adjacent the substrate (1) with a spacer (13) sandwiched therebetween. Facing surfaces (12, 16) of the diaphragm (6) and superstrate (14) are polished and suitably coated to define reflective surfaces and the position of the diaphragm may be altered to vary the response of the interferometer.</p> |
