| 摘要 |
PURPOSE:To extract an image in which a defect, etc., can be identified by irradiating an object work by plural irradiation systems, storing obtained images of the object work in image memory respectively, and processing the contents of respective memories in picture element units and putting the respective images together. CONSTITUTION:Light from bright visual field lighting 2 is aligned with the optical axis of a TV camera 5 through a half-mirror 4 and passed through an objective 6 to illuminate the object work 1. Light from dark visual field lighting 3, on the other hand, illuminates the work 1 directly and slantingly. An image picked up by the camera 5 with the lighting 2 consists of the white aluminum pattern 8 and black cells 9 of the work 1. An image picked up with the lighting 3 consists of the black pattern 8 and white cells 9. Both images are sent to an image processor 7 and stored in the image memories respectively. The processor 7 operates logically with contents in the memories in picture element units to compose a composite image of the images. Thus, the image in which whether or not there is a flaw 10, etc., is easily decided is obtained. |
