发明名称 HALBLEITERBAUELEMENT MIT OBERFLAECHENUEBERZUG UND VERFAHREN ZU SEINER HERSTELLUNG
摘要 A semiconductor element having a surface coating consisting of, for example, a silicon nitride film and a silicon oxide film covering different surface portions of a semiconductor substrate of, for example, silicon so that such surface coating can be utilized for selective diffusion of impurities such as gallium and antimony. In a semiconductor device thus formed, the surface coating acts as a satisfactory surface protective film against external atmosphere, and the backward characteristics of the PN junction can be improved because the end edge of the PN junction terminating at the substrate surface is covered with the silicon nitride film.
申请公布号 DE1589886(B1) 申请公布日期 1972.05.31
申请号 DE19671589886 申请日期 1967.03.21
申请人 HITACHI,LTD. 发明人 TAKEI,ICHIRO;SASAKI,KATSUYOSHI;NISHIDA,SUMIO
分类号 H01L21/00;H01L21/033;H01L21/318;H01L23/29;H01L23/485 主分类号 H01L21/00
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