Epidark illumination device

摘要

An epidark illumination device comprising an optical means whereby a light from a light source is rightly reflected within an entrance plane including an optical axis but is diffused within a plane vertical to the entering plane, a light interrupting plate preventing the light from the light source from directly entering an objective and an iris diaphragm provided near an object to be inspected so as to make a uniform epidark illumination possible and to prevent a stray light from entering an observing optical system.