| 摘要 |
PURPOSE:To remove low molecular org. compds. which are not removable with the conventional device and to produce ultrapure water approximate to the theoretically pure water by interposing a synthetic adsorbent column contg. a synthetic adsorbent to a primary pure water system or sub-system. CONSTITUTION:A filter 6, etc., are provided to a pretreatment system C for original water. A membrane treatment device 7 contg. a membrane such as reverse osmosis membrane is disposed to the primary pure water system D in which the pure water is obtd. from the water treated in the pretreatment system. A mixed bed type ion exchanger 11 and a membrane treatment device 12 contg. a membrane such as ultrafilter membrane, etc., are provided in the sub-system E in which the ultrapure water is obtd. from the pure water of the primary pure water system. The synthetic adsorbent column 13 contg. the synthetic adsorbent is interposed in the system D or E. As a result, the low molecular org. compds. which are difficult to be removed with the conventional device are thus made removable and the total org. carbon is further decreased, by which the ultrapure water approximate to the theoretically pure water is produced. |
