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发明名称
PRODUCTION OF SEMICONDUCTOR HAVING SUPER LATTICE STRUCTURE
摘要
申请公布号
JPS6287488(A)
申请公布日期
1987.04.21
申请号
JP19850226234
申请日期
1985.10.11
申请人
NEC CORP
发明人
MAKITA KIKUO
分类号
C30B29/40;C30B25/16;H01L21/205
主分类号
C30B29/40
代理机构
代理人
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