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经营范围
发明名称
RF SPUTTERING METHOD
摘要
申请公布号
US3677924(A)
申请公布日期
1972.07.18
申请号
USD3677924
申请日期
1970.03.13
申请人
TEXAS INSTRUMENTS INC.
发明人
JOHN H. CASH JR.;JAMES A. CUNNINGHAM
分类号
C23C14/28;H01J37/34;H01L21/00;H01L23/29;(IPC1-7):C23C15/00
主分类号
C23C14/28
代理机构
代理人
主权项
地址
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