发明名称 FINE ROTATING DEVICE
摘要 PURPOSE:To improve precision of fine rotation in a rotational positioning device by engaging an engaging portion provided in the periphery of a rotary member and an engaging pin attached to a fine adjustment lever with each other and linking the extreme end of the fine adjustment lever to a reciprocating driven mechanism. CONSTITUTION:Actuation of the drive motor 31 caused travel of a slider 35 of a reciprocating drive mechanism 3 in the direction shown by an arrow and then resilient deformation of a thin portion 23 of a fine adjustment lever 2 through a transmission pin 36, and fine rotation of the fine adjustment lever 2 causes a pin 24 of a moving portion 13 to apply fine rotating force to a table rotary member 13. Therefore, the table rotary member 13 effects fine rotation, with each of thin resilient pieces 12 resiliently deformed by rotating input of the lever 2. When the slider 35 is retracted, the thin portion 22 returns along with the lever 2, and the thin resilient pieces 12 recovers as the table rotary member 13 returns. On the other hand, when the slider 35 is moved in the opposite direction, the table rotary member 13 effects fine rotation in the opposite direction in the similar way. Thus, fine rotation can be performed precisely and stably.
申请公布号 JPS6284949(A) 申请公布日期 1987.04.18
申请号 JP19850222539 申请日期 1985.10.04
申请人 OMRON TATEISI ELECTRONICS CO 发明人 SASAOKA TOSHIO
分类号 H01L21/68;B23Q1/00;B23Q1/36;B23Q1/52;B23Q5/34;B23Q5/40;B23Q5/56;H01L21/67 主分类号 H01L21/68
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