PLASMA TREATMENT AND APPARATUS FOR THE SAME,申请号JP19860175448-传众专利搜索

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发明名称	PLASMA TREATMENT AND APPARATUS FOR THE SAME
摘要
申请公布号	JPS6285430(A)	申请公布日期	1987.04.18
申请号	JP19860175448	申请日期	1986.07.25
申请人		发明人
分类号	H01L21/302;H01J37/32;H01L21/3065	主分类号	H01L21/302
代理机构		代理人
主权项
地址

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