| 摘要 |
PURPOSE:To make it possible to completely remove foreign matter stuck to the outer surface of a disc member, by providing a rotary drive means for rotating the disc member chucked by a chuck member, and by providing a cleaning member for cleaning the outer surface of the disc member. CONSTITUTION:After shifting of a disc member 9 onto a chuck member, the disc member 9 is moved into a cleaning station by rotating a rotary table 14, and is clamped by means of cleaning tools 28a, 28b. Cleaning liquid is fed into the cleaning tools 28a, 28b through hoses 34a, 34b while they are driven for rotation by means of a motor or the like through the intermediary of a rotary shaft 30, a pulley 31, belts 32a, 32b, pulleys 29a, 29b and rotary shafts 27a, 27b. Thereby, the disc member 9 is cleaned, and since a torque is given to the disc member 9 so that the disc member 9 is rotated while it is supported by the chuck member, thereby the front and back surfaces of the disc member 9 may be uniformly cleaned with its entirely by means of the cleaning tools 28a, 28b. |
