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发明名称
VAPOR GROWTH APPARATUS
摘要
申请公布号
JPS6285424(A)
申请公布日期
1987.04.18
申请号
JP19850225219
申请日期
1985.10.09
申请人
FUJITSU LTD
发明人
TAKIGAWA MASAHIKO
分类号
H01L21/205;H01L21/31
主分类号
H01L21/205
代理机构
代理人
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地址
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