发明名称 LASER SEALING DEVICE
摘要 PURPOSE:To realize high availability of a device by controlling the angle of rotation of a rotary mirror which is provided freely rotatably and reflects a laser beam from a laser beam generating device by a rotation control means for controlling the rotary mirror, and reflecting and entering the laser beam into plural laser sealing optical systems selectively. CONSTITUTION:This device is equipped with an optical path switching device 20 and sealing optical system head parts 24 and 25 which are connected by optical fiber cables 5c and 6c, and the heads 24 and 25 are connected to sealing handler devices 34 and 35. The laser beam guided by the fiber cable 6c exits from an optical fiber 25 and is diffused as a beam which has a uniform intensity distribution; and the light beam is collimated by a lens 25b to illuminate a mask 25c, and directed to a handler 35 by the reflecting mirror 25d. Then, the image of the mask 25c is formed on a package 35a through an image forming lens 25e to perform laser sealing.
申请公布号 JPS6285252(A) 申请公布日期 1987.04.18
申请号 JP19850225247 申请日期 1985.10.09
申请人 NEC CORP 发明人 NAKANO MASAKAZU
分类号 B23K26/00;G03F1/00;G03F1/38;G03F7/20 主分类号 B23K26/00
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