发明名称 X-Y STAGE
摘要 PURPOSE:To make it possible to supply lubricating oil uniformly by making the lower face of an upper surface plate slidably come into contact with the upper face of a lower surface plate so as to slidably support the upper surface plate on the lower surface plate and forming the sliding contact face of one of the surface plates with fine ceramics. CONSTITUTION:A sliding contact face 2a is projected on the part of a lower surface plate 2 and a V groove 4 is provided along the sliding contact face 2a. The sliding contact face 1a of the lower face of the upper surface plate 3 opposing to the sliding contact face 2a of the lower surface plate 2 is formed of porous fine ceramics and brought in contact with the slide and contact face 2a of the lower surface plate 2 so as to slidably support the upper surface plate 3 on the lower surface plate 2. And an oil supply opening 5 is provided to the upper face of the upper surface plate 3. On the other hand, a V shaped sliding contact face 1b formed of porous fine ceramics is provided to the lower face of the upper surface plate 3 and fitted into the V groove 4 of the lower surface plate 2. When lubricating oil is supplied through the oil supply opening 5, an oil film 7 is, therefore, formed over the sliding contact face.
申请公布号 JPS6284944(A) 申请公布日期 1987.04.18
申请号 JP19850222945 申请日期 1985.10.07
申请人 NEC CORP 发明人 ITO NAOYA
分类号 B23Q1/01;B23Q1/26 主分类号 B23Q1/01
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