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发明名称
摘要
申请公布号	JPS6262434(U)	申请公布日期	1987.04.17
申请号	JP19850154017U	申请日期	1985.10.08
申请人		发明人
分类号	C30B19/06;H01L21/208;H01L21/368;(IPC1-7):H01L21/368	主分类号	C30B19/06
代理机构		代理人
主权项
地址

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