| 摘要 |
PURPOSE:To make quickly follow the flow rate to load with the pressure maintained in a target value even in a quick variation of the load by arranging a gas pressure and flow rate non-interacting controller, a feedforward controller, and a gain scheduler. CONSTITUTION:A non-interacting controller 7 consists of PI computing elements 12a, 12b, and non-interacting filters 13a-13d. By combining a matrix resolution technique with a partial model matching technique, an optimum value of these parameters can be easily obtained. A gain scheduler 9 outputs the above control parameters according to flow rate signals by interpolating the control parameters in previously inputted representative flow rate. A feedforward controller 8 compensates the variations of pressure and flow rate based on load variation and load level. By arranging these equipment, even in quick load variation, the flow rate is made quickly follow with the pressure maintained in a target value. |
