| 摘要 |
<p>PURPOSE:To reduce process time and to improve the yield of production by using yellow, cyan and magenta color material layers and producing a color filter by prescribed stages. CONSTITUTION:A highly flat glass substrate contg. Na at a low ratio is provided in a vacuum vessel and Cd sulfide is deposited by evaporation as a dye layer in a vacuum on the substrate. A positive type photoresist is coated thereon by a roller. The film is dried and is prebaked at 185 deg.C. The film is then exposed with UV by using an exposing mask having a desired dye film pattern. After the resist is selectively dissolved by an aq. KOH soln., the film is etched with an aq. hydrochloric acid soln. Mask pattern exposure is then executed so as to form a desired pattern adjacent to the part exposed with the light. Copper phthalocyanine 4 is further deposited by evaporation on the substrate, and thereafter the entire surface is exposed and the remaining resist layer is removed by alkali development. Again the positive type resist is coated on the surface and is subjected to UV exposure in such a manner that the part having no vapor-deposited layers of two colors is removed of the film. Irgasin Red is then deposited by evaporation on the surface. The remaining resist is subjected to UV exposure. The three-color dye films are thus formed on the transparent substrate.</p> |
