| 摘要 |
<p>PURPOSE:To improve electric current stability and electron emission characteristic, by applying a strong electric field under ultra-high vacuum, after subjecting a carbon titanium nitride monocrystal emitter to treatment in a hydro-carbon gas and forming a carbon coat on the emitter surface. CONSTITUTION:A carbon titanium nitride monocrystal emitter is subjected to heat treatment at 900-1,400 deg.C in a hydro-carbon gas to form a carbon coat on its surface, and then a strong electric field of 10<7>V/cm or more is applied under ultra-high vacuum to the emitter. The carbon coat is formed by heating a TiCN chip at 900-1,400 deg.C in a hydro-carbon gas. The heating time should be 100L (L=10<-6>X1sec) or more. Namely, the hydro-carbon gas is introduced into an ultra-high vacuum device, and in the case of a degree of vacuum of 5X10<-6>Torr, the treatment time of 20sec or more is required. As a result, the field emitter presents excellent characteristic of current noise of less than + or -0.2% and drift of less than + or -0.2%/hr, and its electron emission characteristic is extremely stable, showing a constant current value.</p> |
