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发明名称
APPARATUS FOR MANUFACTURING AMORPHOUS SEMICONDUCTOR FILM
摘要
申请公布号
JPS6281022(A)
申请公布日期
1987.04.14
申请号
JP19850221183
申请日期
1985.10.04
申请人
FUJI ELECTRIC CO LTD
发明人
NABETA OSAMU
分类号
H01L31/04;H01L21/205
主分类号
H01L31/04
代理机构
代理人
主权项
地址
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