| 发明名称 |
Apparatus and method for obtaining three dimensional surface contours |
| 摘要 |
Phase measurements of deformed grating images are used in performing improved optical profilometry. Individual line profiles are obtained at a series of rotational increments of a body. A full 360 degree surfce profile, or a portion thereof, can then be generated.
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| 申请公布号 |
US4657394(A) |
申请公布日期 |
1987.04.14 |
| 申请号 |
US19850753722 |
申请日期 |
1985.07.10 |
| 申请人 |
NEW YORK INSTITUTE OF TECHNOLOGY |
发明人 |
HALIOUA, MAURICE |
| 分类号 |
G01B11/25;(IPC1-7):G01B11/24 |
主分类号 |
G01B11/25 |
| 代理机构 |
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