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发明名称
ION SOURCE
摘要
申请公布号
JPS6280950(A)
申请公布日期
1987.04.14
申请号
JP19850220115
申请日期
1985.10.04
申请人
HITACHI LTD
发明人
KUROSAWA YUKIO;HAKAMATA YOSHIMI;ONO YASUNORI;HIRASAWA KUNIO;SATO TADASHI
分类号
H01J27/08;H01J27/18;H01J37/08
主分类号
H01J27/08
代理机构
代理人
主权项
地址
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