| 摘要 |
PURPOSE:To readily alter and set mixture ratio in a site by providing a raw material section for individually supplying two or more types of liquids in predetermined quantity, and a mixer section for mixing and preparing the liquids to be supplied from the raw material section. CONSTITUTION:Constant quantity pumps 4, 7 of a raw material section operate on a lower limit signal of the mixture solution of a pressure tank 13, pure water and raw solution are mixed at a predetermined ratio to be fed to a preparing tank 3. The mixture liquid is supplied by a pressure pump 8 to a pressure tank 13, and supplied by the gas pressure of a gas inlet tube 9 through a pipe 10 and a dropping nozzle 11 to a semiconductor substrate 12. Accordingly, since preparing the number and types of medicines can be freely selected and the mixture ratio can be readily varied by setting the supplying quantity of the pump, desired development can be performed. |
