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发明名称
ELECTRON IRRADIATION TYPE FILM FORMING DEVICE
摘要
申请公布号
JPS6280274(A)
申请公布日期
1987.04.13
申请号
JP19850221429
申请日期
1985.10.04
申请人
ANELVA CORP
发明人
ASAMAKI TATSUO
分类号
C23C16/48;C23C16/27
主分类号
C23C16/48
代理机构
代理人
主权项
地址
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