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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPS6279625(A)
申请公布日期
1987.04.13
申请号
JP19850219261
申请日期
1985.10.03
申请人
OKI ELECTRIC IND CO LTD
发明人
KURACHI IKUO
分类号
H01L21/306
主分类号
H01L21/306
代理机构
代理人
主权项
地址
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