发明名称 PRODUCTION OF ORIGINAL PLATE FOR FORMING METALLIC MASK
摘要 PURPOSE:To produce an accurate and durable original plate for forming a metallic mask by forming a primary plated layer on a substrate and a metallic pattern corresponding to a patterned plate on the plated layer and by bonding the substrate to a resin substrate by heating under pressure. CONSTITUTION:The surface of a substrate 7 is cleaned by degreasing and subjected to primary plating. A layer 9 of a photosensitive agent is formed on the resulting plated layer 8, a patterned plate 10 is brought into close contact with the layer 9, and the layer 9 is exposed and developed. A metallic pattern 11 is then formed by electroplating, a resin substrate 12 having a resin layer 13 for adhesion is placed on the pattern 11 and bonded to the substrate 6 by heating under pressure, and the substrate 7 and the primary plated layer 8 are removed to produce an original plate. By this operation, the metallic pattern is fixed and the stripping of the pattern can be prevented, so a fine metallic pattern can be formed and high accuracy and durability are provided to the original plate.
申请公布号 JPS6280291(A) 申请公布日期 1987.04.13
申请号 JP19850218959 申请日期 1985.10.01
申请人 SHARP CORP;TAIYO KOGYO KK 发明人 AKETO AKIHIRO;HOSOE MASAMI;BABA KAZUMORI;UENO YUKIHIRO
分类号 C25D1/10;H01L21/027;H01L21/203;H01L21/30;H01L21/31 主分类号 C25D1/10
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