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发明名称
METHOD AND APPARATUS FOR PLASMA TREATMENT
摘要
申请公布号
JPS6277483(A)
申请公布日期
1987.04.09
申请号
JP19850216399
申请日期
1985.09.30
申请人
JAPAN SYNTHETIC RUBBER CO LTD;FUJI PHOTO FILM CO LTD
发明人
YANAGIHARA KENJI;KIMURA MITSUO;SHINKAI MASAHIRO;NISHIKAWA YASURO;MUKODA YOSHIHITO
分类号
C23C14/12;C08F2/00;C08F2/52;C23C16/50;C23F4/00
主分类号
C23C14/12
代理机构
代理人
主权项
地址
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