| 摘要 |
<p>A process and apparatus for coating a substrate (14) with source material from a solid cathode (15) in a vacuum chamber (11) supplied with a reactive or inert gas (39) at low pressure. An electric arc (34) is generated between an evaporable end surface (35) of the cathode (15) and an anode (18). An elongated member (36) surrounds the cathode (15) and extends a predetermined minimum distance "X" beyond the evaporable end surface (35) of the cathode (15) to form a cathode chamber (37). The inert or reactive gas (39) is directed to flow into the cathode chamber (37) before entering the vacuum chamber (11).</p> |
