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经营范围
发明名称
CVD DEVICE
摘要
申请公布号
JPS6277474(A)
申请公布日期
1987.04.09
申请号
JP19850218757
申请日期
1985.09.30
申请人
SHIMADZU CORP
发明人
TAKAMIYA HIROSHI
分类号
C23C16/48;C23C16/50
主分类号
C23C16/48
代理机构
代理人
主权项
地址
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