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发明名称	SILICON WAFER AND MANUFACTURE THEREOF
摘要
申请公布号	JPS6276713(A)	申请公布日期	1987.04.08
申请号	JP19850217203	申请日期	1985.09.30
申请人	MITSUBISHI METAL CORP	发明人	SUGA HISAAKI
分类号	H01L21/322;H01L21/18	主分类号	H01L21/322
代理机构		代理人
主权项
地址

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