发明名称 RESIST REMOVING DEVICE
摘要 PURPOSE:To improve the security and operating efficiency of a device and to stabilize a process control by providing a waste liquor cooling tank surrounding a periphery of a processing tank and introducing chemicals in the processing tank by use of a cooling aspirator to cool the chemicals by the cooling aspirator and a cooling water from a cooling water shower. CONSTITUTION:On a periphery of a processing tank 11, a waste liquor cooling tank 15 surrounds it. Between them, a cooling aspirator 16 is arranged and its suction pipe 17 is inserted in chemicals 13 in the processing tank 11. By flowing a cooling water (CW) in the cooling aspirator 16, the chemicals 13 are sucked and introduced into a waste liquor cooling tank 15 together with the cooling water. Also, a cooling water shower 18 is provided inside the processing tank 11, which supplies a cooling water to cool the processing tank 11. Similarly, a cooling water shower 20 is provided between the processing tank 11 and a waste liquor cooling tank 15, which supplies a cooling water from a cooling water pipe 21 to cool a waste liquor 22 in the processing tank 11 and waste liquor cooling tank 15.
申请公布号 JPS6276624(A) 申请公布日期 1987.04.08
申请号 JP19850216465 申请日期 1985.09.30
申请人 TOSHIBA CORP 发明人 MIYAMOTO KAZUNORI
分类号 H01L21/30;G03F7/00;G03F7/30;G03F7/42;H01L21/027 主分类号 H01L21/30
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