| 摘要 |
PURPOSE:To realize high-density wire bonding with a capillary having a tip of a fine diameter by making the capillary have a bottle neck-shaped part and formed of ceramics comprising one kind of groups Si3N4, ZrO2, Al2O3, SiC, and Si-Al-O-N, as a main element. CONSTITUTION:A capillary 2 is formed of ceramics which comprise one kind selected from groups Si3N4, ZrO2, Al2O3, SiC, and Si-Al-O-N, as a main element. Si3N4 group ceramics comprising Al2O3 in 0.5-5wt%, AlN in 0.5-5wt%, Y2O3 in 1-7wt%, and Si3N4 in the remnant are desirable. And, the capillary 2 has a bottle neck shaped in which its outer diameter becomes small rapidly from a prescribed portion. Therefore, a capillary having a high degree of strength, even with its inner and outer diameters of the tip 2a made small, can be obtained. Besides, because the capillary is made of very strong ceramics, the inner and outer diameters of the tip 2 can be made smaller. |
