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发明名称
SEMICONDUCTOR DEVICE INCLUDING A METAL SILICIDE
摘要
申请公布号
EP0115287(A3)
申请公布日期
1987.04.08
申请号
EP19840100327
申请日期
1984.01.13
申请人
KABUSHIKI KAISHA TOSHIBA
发明人
KAWAGUCHI, TATSUZO
分类号
H01L21/28;H01L21/336;H01L29/43;H01L29/49;H01L29/78;(IPC1-7):H01L29/62
主分类号
H01L21/28
代理机构
代理人
主权项
地址
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