| 摘要 |
PURPOSE:To shorten a redundancy time at restarting time by providing a main discharger for supplying power to obtain a laser light output, and an auxiliary discharger for supplying power for maintaining the glow discharge. CONSTITUTION:A main discharge circuit supplies a large current through ballast resistor rbM of relatively small resistance for mainly current balance, and an auxiliary discharger supplies a small current through a ballast resistor rbS of relatively large value to be independently controlled. The operation of starting a glow discharge by insulation breakdown by outputting a voltage higher than the discharger starting voltage is executed by the DC voltage VDS of the auxiliary discharger, and the DC output voltage VDM of the main discharger is set to the necessary minimum limit voltage to feed the current to rated value. Thus, mixture gas pressure operation of the power source capacity of the necessary minimum limit is eliminated to obviate the redundancy time at stopping and restarting time. |
