| 摘要 |
PURPOSE:To improve light emitting efficiency and the stability of characteristics, by using a Langmuir-Blodget membrane including polyester as an organic thin film, thereby constituting an MIS junction with the organic thin film as an insulating film. CONSTITUTION:As an insulating film for an MIS type light emitting element, an organic LB film including polyester is used. At first, surface cleaning treatment (SH treatment) of a semiconductor substrate is performed by an ordinary method. Thereafter, the substrate is put in an LB-film forming device. The inside of a sub-phase aqueous phase is prepared and maintained at specified pH, temperature and metal-salt concentration. A developing solution of an organic material including polyester is dropped on the surface of water and a unimolecular film layer is developed. Thereafter, with the unimolecular film layer being kept at a specified surface pressure, at which a condensation film is formed. The LB film having a specified thickness is built up on the substrate by applying a vertical lift-off method or a horizontal attaching method by a plurality of times. Then, the substrate is sufficiently dried in an inactive gaseous atmosphere such as, e.g., N2 and Ar. The substrate is set in an evaporating apparatus. A specified metal is evaporated on the LB film through an evaporation mask having a suitable pattern. Thus an electrode is formed. |
