| 摘要 |
PURPOSE:To perform a test efficiently by using an electron beam, by providing testing terminals, which are connected to signal wirings on a chip through linking wirings, in a concentrated manner in a specified region. CONSTITUTION:The shape of a region 2 is designed to have a rectangular form, which has a size so that the image mode test using an EB tester can be processed by one time. Linking wirings 4 are formed in a configuration so that the wirings are branched or extended from signal wirings 3 on a chip 1. The open ends of the wirings 4 are collected in the region 2 from all the directions and testing terminals 5 are formed. When the region 2, in which the testing terminals 5 are concentrated, is provided, the potential, i.e., the presence or absence of abnormalities of the many signal wirings 3 such as wire breakage and short circuits, can be investigated by one time, by performing an image mode test of the terminals 5 in the region 2 by using an EB tester. Therefore,the testing efficiency is improved to a large extent. |
