发明名称 Alignment method
摘要 A method of aligning an object comprises the steps of providing a V-shaped mark which moves in correspondence with the position of the object, determining a position where this mark and a straight mark detection line crosses each other, and positioning this object on the basis of information on this determined position.
申请公布号 US4655600(A) 申请公布日期 1987.04.07
申请号 US19850768621 申请日期 1985.08.23
申请人 SHARP KABUSHIKI KAISHA 发明人 TANIGAWA, TOHRU
分类号 H01L21/68;G02F1/1333;G03F9/00;G05D3/12;H01L21/67;(IPC1-7):G01B11/27 主分类号 H01L21/68
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