发明名称 |
Micro-displacement measuring apparatus using a semiconductor laser |
摘要 |
A micro-displacement measuring apparatus using a semiconductor laser, comprises a compound resonator system containing the semiconductor laser, and a light detector receiving the light from the semiconductor laser, and with the compound resonator system being constructed such that light from said laser irradiates an object to be measured and the reflected light therefrom returns to the semiconductor laser. The light detector detects and measures the number of fluctuations and the level of the optical output of the laser to determine the displacement of the object and of the direction of the displacement of the object, respectively.
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申请公布号 |
US4655597(A) |
申请公布日期 |
1987.04.07 |
申请号 |
US19850739013 |
申请日期 |
1985.05.29 |
申请人 |
SHARP KABUSHIKI KAISHA |
发明人 |
YAMAMOTO, OSAMU;MATSUI, SADAYOSHI;TAKIGUCHI, HARUHISA;HAYASHI, HIROSHI;MIYAUCHI, NOBUYUKI |
分类号 |
G01S17/08;G01B11/00;G01D5/26;H01S5/14;(IPC1-7):G01B11/00 |
主分类号 |
G01S17/08 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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