发明名称 |
Diffraction grating position adjuster using a grating and a reflector |
摘要 |
A method of adjusting a relative positional relationship between two objects uses a diffraction grating. A first diffraction grating is arranged on a first object located to oppose a second object, a reflecting surface is arranged at a position of the second object which corresponds to the first diffraction grating, and the method includes the step of irradiating the first diffraction grating with a radiation beam of coherent light or quasi-monochromatic light and measuring/setting the gap between the first and second objects in accordance with a change in intensity of one of the diffracted light components from the first diffraction grating.
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申请公布号 |
US4656347(A) |
申请公布日期 |
1987.04.07 |
申请号 |
US19850695698 |
申请日期 |
1985.01.28 |
申请人 |
NIPPON TELEGRAPH & TELEPHONE PUBLIC CORPORATION |
发明人 |
UNE, ATSUNOBU;IKI, MAKOTO;TAKEUCHI, NOBUYUKI;DEGUCHI, KIMIYOSHI |
分类号 |
G03F9/00;(IPC1-7):G01B11/02;G01N21/86 |
主分类号 |
G03F9/00 |
代理机构 |
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代理人 |
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主权项 |
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