发明名称 INSPECTING DEVICE FOR SEMICONDUCTOR WAFER
摘要 PURPOSE:To improve the operating efficiency with a simple construction by a method wherein the titled device is equipped with a means of detecting the liquid amount in an inkpot containing ink to an inker and a means of replenishing the inkpot with ink according to the detection of this detecting means. CONSTITUTION:The inker 10 is placed in such a manner that a marking extrusion part 11 supported movably in the direction of extrusion via ink extruder 18 is inserted through the inkpot 12. The inkpot is provided with an ink surface detecting mechanism 19 in the upper part, and with an ink replenishing tube 20 connected to the side surface. When the completion of ink replenishment is detected, the result is inputted to the reset input 271 of a flip-flop circuit 27. The output of a timer 28 is connected to the other input terminal of this circuit. Then, the output terminal 273 is connected to a electromagnetic valve of a low pressure air source via buffer circuit 29, and the output terminal 274 to an air removal electromagnetic valve via buffer circuit 31. The electromagnetic valves 30 and 32 are connected to the top of an ink replenishing container 33.
申请公布号 JPS60113440(A) 申请公布日期 1985.06.19
申请号 JP19830220984 申请日期 1983.11.24
申请人 TOSHIBA KK 发明人 UTENA KATSUAKI;KIMOTO YOSHITAKA
分类号 H01L21/66;(IPC1-7):H01L21/66 主分类号 H01L21/66
代理机构 代理人
主权项
地址