| 摘要 |
PURPOSE:To enable automatic taking-in and delivery with a compact means by a method wherein unprocessed wafers and processed wafers are carried to the receiver part respectively by means of a wafer holding members in stalled to an arm which is flexible and rotatable. CONSTITUTION:The titled device is composed of wafer mounts 1A and 1B rotatably provided and treating wafers by mounting, the supply part 2 of untreated wafers, the receiver part 3 of treated wafers, and the carrier means 4. The carrier means has the wafer holding member 53 to the arm 52 flexible and rotatable and, by the expansion and contraction and the rotation of this arm, positions the wafers with the holding member to the wafer mounts, the supply part, and the receiver part, respectively. The untreated wafers are taken up from the supply part by means of the holding member, carried onto the mounts by the rotation of the arm, and mounted to fixed positions on the mounts according to the amount of arm expansion and contraction. |
